Carl Zeiss Axio Imager Vario microscope system

Axio Imager Vario is a flexible, high-performance microscope system that reliably and easily safeguards the quality of large samples. A fully motorised, fixed-stage microscope with an adjustable sample space, the product supports complex solar cell production and solar cell analysis applications, plus many other tasks that require a high degree of automation and reproducibility.

An integratable autofocus system ensures fast and precise focusing: the Hardware Auto Focus is suitable for surface inspections on reflective, low-contrast samples. In transmitted and reflected light (brightfield, darkfield, polarisation contrast and oblique illumination), the focus system ensures high precision down to 0.3 of the depth of field of the objective lens.

The sensor registers changes in the focus position and automatically and quickly compensates any deviations via direct access to the Z-drive of the microscope. As a result, even large samples such as monitors and solar panels remain constantly in focus.

The product is certified for cleanroom use in accordance with DIN EN ISO 14644-1 and, along with the cleanroom kit, fulfils the requirements of ISO 5, the most commonly used cleanroom class. Accessories such as the 7x turret with particle protection and sneeze guard ensure that samples such as wafers and photomasks are clean at all times.