Kurt J Lesker NANO 36 thin film deposition system
The Kurt J Lesker NANO 36 thin film deposition system has been designed to accommodate most thermal evaporation processes and magnetron sputtering (including: RF, DC and pulsed DC). It is suitable for entry- to mid-level users in university, industrial and government R&D laboratories.
The compact (1270 x 940 x 1727 mm) and portable system contains a range of features including: four thermal evaporation sources with film thickness monitor or control package; up to 8″ wafer; magnetron sputter source option; 12″ diameter x 18″ glass Pyrex bell jar with implosion guard (optional St Stl box chamber); turbomolecular high-vacuum pumping system with dry backing pump; substrate heating option; manual colour touch-screen PC-based process automation.
The system is suitable for applications including photovoltaics/solar cells; SEM/TEM sample prep, organic LEDs, organic PVs, photonics/sensors, nanofabrication and medical devices.
Phone: 02 9496 4200
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