Aerotech PlanarDLA XY linear motor stages

Aerotech has introduced a series of integrated open-frame stages with precise geometric performance and micrometre-level straightness. There are nine models in the series to accommodate user requirements for travel and accuracy.

The PlanarDLA stages include high-precision roller bearings, precision-machined surfaces and non-contact linear motors that drive through the axes’ centre of stiffness. These features result in straightness to ±0.5 µm and flatness to ±1.25 µm.

The product enables high-throughput processing with 2 m/s velocities and 2 g accelerations, resulting in good process yield and a low total cost of ownership. It achieves high servo bandwidths while maximising the clear aperture available and keeping the overall height to a minimum. Aerotech’s direct-drive technology offers high speed and accurate positioning, coupled with maintenance-free operation and long service life.

The low-profile stages are designed for a wide range of applications, including semiconductor manufacturing; electronics manufacturing (LEDs); test and inspection; laser processing; metals inspection; micromachining; nanotechnology; medical; laboratory; optical metrology; wafer processing; metrology; and automation. The stages are available with one or two motors per axis, allowing optimisation of each axis for the specific application and process.