Atomic force microscope

The Agilent 5600LS is a high-resolution atomic force microscope that uses a fully addressable 200 x 200 mm stage to image large samples in air or smaller samples in liquid. The system also enables high-resolution imaging of a small sample area using a low-noise AFM or STM scanner.

The system is suitable for a wide range of nanotechnology applications, including semiconductor, data storage, polymers, materials science and life science studies.

Samples up to 20 cm in diameter and 30 mm tall are easily accepted by the AFM’s 200 mm vacuum chuck; the programmable stage can accommodate a 300 mm wafer with repositioning.

Accurate location mapping (400 nm precision) ensures reproducibility. The system allows simple, software-driven, point-and-shoot AFM imaging of an area based on an optical view. Motorised optical zoom and focus provide simple application.

Any of Agilent’s multipurpose scanners, including open-loop, closed-loop and STM options, can be used with the 5600LS. It is also compatible with contact mode, acoustic AC mode, phase imaging, LFM, EFM, MFM, force modulation, current sensing and MAC Mode III.