JEOL JIB-PS500i FIB-SEM system

In the preparation of samples for transmission electron microscopes (TEM), high precision and thin samples are required. JEOL’s JIB-PS500i is a combined system with an FIB (focused ion beam) that is designed to process with high accuracy and an SEM (scanning electron microscope) with high resolution.

The FIB column enables processing with a large-current Ga ion beam up to 100 nA. The high-current processing is particularly effective in preparing cross-section samples for large-area imaging and analysis. In addition, the FIB column is set to a short working distance, for good processing performance at a low accelerating voltage.

A super conical lens system is built into the SEM column, designed to improve the image resolution at a low accelerating voltage. This imaging is useful for checking the end-point milling status of a lamella specimen using the SEM.

The product features a large specimen chamber and specimen stage, increasing the stage movement range and thus accommodating a large specimen. In addition, a STEM detector can be used with the stage tilt at 90°, allowing for a seamless transition from the TEM specimen preparation to STEM observation.

For the operating GUI, the company’s SEM Center software is employed, enabling full integration of EDS analysis. A double tilt cartridge and a dedicated TEM holder allow for good alignment while making specimen transfer between TEM and FIB easy.