Accurion active vibration isolation systems

Active vibration isolation is the active compensation of disturbing vibrations by generating a counterforce. Ever since high-resolution measurements and manufacturing techniques have reached nanometre scales, vibrations have become a major problem.

Effective elimination of disturbing vibrations can be the key to precise and repeatable results. The approach is to isolate the application from a vibration source. Typical sources of disturbing vibrations can be building and floor vibrations, acoustic vibrations, and motorised equipment and machinery.

Active vibration isolations systems from Accurion feature no natural low-frequency resonance, which results in good vibration performance even in the low-frequency range. The system has a short settling time of 0.3 s, active bandwidth of 0.6/1 Hz to 200 Hz (beyond passive isolation) and active vibration isolation in six degrees of freedom.

The product results in the instantaneous generation of a counterforce to compensate vibrations — real active vibration isolation. It has a compact design, low installation effort and high position stability. A push-button solution makes it easy to use and there is no compressed air required.

The system is available in a wide range of standard versions with customisation available. Applications include profilometers, ultraprecise scales, sensitive laser set-ups, small SEMs, ultramicrotomes, ellipsometers, nanointenders, inverse microscopy with or without AFM head, patch-clamp set-ups, CLSLM/LSCM and NSOM/SNOM.